Abstract: To investigate the anti-vibration structure design of precision instrument workshop, this article evaluates the micro-vibration level of a single-story light steel factory located in a high-tech electronic industrial plant of Suzhou by conducting field measurement and numerical simulation. We carried out the micro-vibration tests before and after the construction of the structure to reveal the effectiveness of the structure on vibration reduction. We built the dynamic finite element model of the plant by ANSYS software. Then we analyzed the sensitivity of design parameters by introducing the structural and foundation design parameters of Rayleigh damping and floor thickness. The investigation shows that, the vibration of the bottom structure meets the limitation requirements after the plant is completed. The pile-raft foundation of the factory building has great effect on vibration reduction. Damping and floor thickness have little effect on structure frequency, but have a greater impact on amplitude. The vibration amplitude of the structure decreases with the increase of Rayleigh damping, especially in the low frequency range of 1~3 Hz and 10~50 Hz, and also decreases as floor thickness increasing in the low frequency range(within 50 Hz). Therefore, in the anti-vibration design of the plant, properly increasing floor thickness and damping can reduce the middle and low frequency vibration(within 50 Hz) significantly and achieve a better vibration isolation effectiveness.