Abstract: Aiming at different surface movement and deformation can be produced by the inclined tunnel excavation. The formulas of ground surface movement and deformation due to semicircle-tunnel excavation have been derived by using stochastic medium theory. By calculating the ground surface movement and deformation at different sections of inclined tunnel, the surface of maximum subsidence, horizontal displacement, the maximum value of tilt and maximum curvature are obtained. The influence of surface movement and deformation is analyzed at different positions of inclined tunnel. Result may provide reference for the planning of the electric power plant.