Abstract: Affected by the change of underground factors, the heritage buildings often have uneven settlement of foundation and cracks on the wall, which seriously influence the safe of the heritage buildings. Aiming at the damage influenced by the deformation of the air-raid shelter of Longmu Temple in Beisong Zhuang, Shanxi Province, the high density resistivity nondestructive survey method is used to measure the cracks and uneven settlement of foundation on site. The results present the distribution area of the air-raid shelter accurately, which provide important data support for the protection of Longmu Temple and the scheme of governing the underground environments. The practical results indicates that the high density electrical nondestructive survey method is an important detection method for the underground structure of heritage buildings. The high density electrical nondestructive survey method has the characteristics of nondestructive and speediness, and accords with the basic principles of cultural relics protection.