Abstract: High-density electrical resistivity survey has been generally used in engineering geology and environmental geology. However, electrical resistivity is not enough to find water and mineral, and polarizability has better effect in these region. But, there has the problem of polarization of current electrode. We used a new software and hardware to compensate self-potential. Meanwhile, filtering technique associated software and hardware is use to restrain disturbance from natural electric field. It increases the accuracy and anti-jamming capability of the instrument. General steel metal electrodes can perform polarization measurement. This affords change to find water and mineral using high-density electrical resistivity method. A large number of practical application has shown that the combination of high-density electrical resistivity and high density polarization have obtained good effects in engineering geology and environmental geology, as well as mineral geology and hydrological geology exploration.