Abstract: In the past three decades, along with the acceleration of infrastructure construction and urbanization, a series of disasters related to ground deformation have emerged in various parts of China, resulting in a series of economic losses and casualties. Ground deformation monitoring plays an important role in preventing ground subsidence, ground subsidence and foundation instability. The conventional monitoring technologies is more and more difficult to meet the requirements of engineering practices in terms of real-time performance, coverage and accuracy. Therefore, a reliable monitoring system with high sensitivity, large dynamic range, stable performance and economic consideration is urgently needed. This paper introduces the working principle of distributed fiber optic sensing(DFOS)technologies and their unique advantages in ground deformation monitoring. This paper lists several common distributed optical fiber sensing technology, and summarized the research progress of the technology and its application in ground deformation mechanism study and engineering practice, the different monitoring scheme and the laying process comparative analysis. At last, the current bottleneck of ground deformation monitoring technology based on DFOS is summarized, and the development trend of this research is pointed out in the future.